Microhotplates with TiN heaters

Direct synthesis of tin oxide nanotubes on microhotplates using carbon nanotubes as templates

Prahalad Parthangal Departments of Mechanical Engineering and Chemistry, University of Maryland, College Park, Maryland 20742; and Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 Richard E. Cavicchi, Douglas C. Meier, and Andrew Herzing Chemical Science and Technology Laboratory, National Institute of Standards and Technol...

Simulation and fabrication of microhotplates for metal oxide gas sensors

Inducing chalcogenide phase change with ultra-narrow carbon nanotube heaters

Carbon nanotube CNT heaters with sub-5 nm diameter induce highly localized phase change in Ge2Sb2Te5 GST chalcogenide. A significant reduction in resistance of test structures is measured as the GST near the CNT heater crystallizes. Effective GST heating occurs at currents as low as 25 A, significantly lower than in conventional phase change memory with metal electrodes 0.1– 0.5 mA . Atomic for...

Double-Pass Flat-Plate Solar Air Heaters with External Recycle

A new device of inserting an absorbing plate to divide a flat-plate channel into two channels with fins attached and external recycling at the ends, resulting in substantially improving the heat transfer efficiency, has been investigated both experimentally and theoretically. The agreement of the theoretical predictions with those measured values from the experimental results is fairly good. Th...

Miniaturized ceramic platform for metal oxide gas sensors array

In work is developing an ultra-fast, low cost and technology flexible process for production array of ceramic MEMS microhotplates for using in semiconductor gas sensors orientated to small series applications, where is sufficient to produce 10-100 samples with a different layout of heaters and membrane per day.